A dielectric coating for improved performance of capacitive...

Microelectronic Engineering 2020 / 02 Vol. 223

A dielectric coating for improved performance of capacitive sensors in all-polymer microfluidic devices

Offenzeller, Christina, Hintermüller, Marcus A., Hilber, Wolfgang, Jakoby, Bernhard
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Volume:
223
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2020.111220
Date:
February, 2020
File:
PDF, 2.22 MB
2020
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