Role of template layers for heteroepitaxial growth of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 01 Vol. 38; Iss. 1

Role of template layers for heteroepitaxial growth of lanthanum oxide on GaN(0001) via atomic layer deposition

Chen, Pei-Yu, Hadamek, Tobias, Kwon, Sunah, Al-Quaiti, Fatima, Posadas, Agham B., Kim, Moon J., Demkov, Alexander A., Ekerdt, John G.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5131638
Date:
January, 2020
File:
PDF, 4.81 MB
2020
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