Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate

Technical Physics Letters 2019 / 12 Vol. 45; Iss. 12

Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate

Lunin, L. S., Devitskii, O. V., Sysoev, I. A., Pashchenko, A. S., Kas’yanov, I. V., Nikulin, D. A., Irkha, V. A.
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Volume:
45
Journal:
Technical Physics Letters
DOI:
10.1134/S106378501912023X
Date:
December, 2019
File:
PDF, 562 KB
2019
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