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Structure and crystallographic orientation of aluminum films onn-andp-silicon in the Al-Ti-Si and Al-Ti-SiOx-Si systems
L. I. Gurskii, Yu. P. SnitkovskiiVolume:
49
Language:
english
Pages:
4
DOI:
10.1007/s11041-007-0068-8
Date:
July, 2007
File:
PDF, 147 KB
english, 2007