ChemInform Abstract: OXYNITRIDE DEPOSITION KINETICS IN A...

Chemischer Informationsdienst 1977 / 07 Vol. 8; Iss. 30

ChemInform Abstract: OXYNITRIDE DEPOSITION KINETICS IN A SILANE-CARBON DIOXIDE-AMMONIA-HYDROGEN SYSTEM

GAIND, A. K., ACKERMANN, G. K., LUCARINI, V. J., BRATTER, R. L.
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Volume:
8
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197730031
Date:
July, 1977
File:
PDF, 104 KB
1977
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