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ChemInform Abstract: OXYNITRIDE DEPOSITION KINETICS IN A SILANE-CARBON DIOXIDE-AMMONIA-HYDROGEN SYSTEM
GAIND, A. K., ACKERMANN, G. K., LUCARINI, V. J., BRATTER, R. L.Volume:
8
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.197730031
Date:
July, 1977
File:
PDF, 104 KB
1977