Subsurface damage and phase transformation in laser-assisted nanometric cutting of single crystal silicon
Chen, Xiao, Liu, Changlin, Ke, Jinyang, Zhang, Jianguo, Shu, Xuewen, Xu, JianfengLanguage:
english
Journal:
Materials & Design
DOI:
10.1016/j.matdes.2020.108524
Date:
January, 2020
File:
PDF, 2.12 MB
english, 2020