Enhanced piezoelectric tactile sensing behaviors of high-density and low-damage CF4-plasma-treated IGZO thin-film transistors coated by P(VDF-TrFE) copolymers
Jer-Chyi, Wang, Yi-Pei, Jiang, Chi-Hung, Lin, Shun-Hsiang, Chan, Ming-Chung, WuLanguage:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.111855
Date:
January, 2020
File:
PDF, 3.56 MB
english, 2020