A compact cantilever type ultrasonic motor with nanometer...

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IEEE Transactions on Industrial Electronics 2020

A compact cantilever type ultrasonic motor with nanometer resolution: design and performance evaluation

Wang, Liang, Guan, Yuntian, Liu, Yingxiang, Deng, Jie, Liu, Junkao
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Year:
2020
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2020.2965481
File:
PDF, 1.33 MB
english, 2020
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