Effect of annealing atmosphere (CO and N2 gas flow) on...

  • Main
  • 2020 / 1
  • Effect of annealing atmosphere (CO and N2 gas flow) on...
Ceramics International 2020 / 1

Effect of annealing atmosphere (CO and N2 gas flow) on surface morphology and crystal quality of AlN buffer layer

Cheng, Cheng, Lai, Wei-Han, Huang, Chun-Kai, Liu, Cheng-Yi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2020.01.128
Date:
January, 2020
File:
PDF, 1.82 MB
english, 2020
Conversion to is in progress
Conversion to is failed