Influence of a silicon cap on SiGe passivation by anodic oxidation
Rappich, J., Sieber, I., Schöpke, A., Füssel, W., Glück, M., Hersener, J.Volume:
451
Year:
1996
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-451-215
File:
PDF, 795 KB
english, 1996