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Contactless device characterization of transistor structures in silicon using electro optical frequency mapping (EOFM)
Beyreuther, A., Herfurth, N., Nakamura, T., Fischer, G.G., Keil, S., Boit, C.Volume:
106
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2020.113583
Date:
March, 2020
File:
PDF, 1.93 MB
english, 2020