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Impact of Process-induced Variability on the Performance and Scaling of Ge2Sb2Te5 Phase-Change Memory Device
Durai, SURESH, Raj, Srinivasan, Manivannan, AnbarasuLanguage:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab7214
Date:
January, 2020
File:
PDF, 1.51 MB
english, 2020