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Non-routine Dopant, Impurity and Stoichiometry Characterization of SiGe, SiON and Ultra-low Energy B-implanted Si Using Secondary Ion Mass Spectrometry
Magee, Charles W., Buyuklimanli, Temel H., Marino, John W., Novak, Steven W., Sahiner, M. AlperVolume:
717
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-717-C6.1/B9.1
File:
PDF, 1.71 MB
english, 2002