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[IEEE 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Daejeon, Korea (South) (2019.7.28-2019.8.1)] 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Thermal dynamics of 2-axis electrothermal MEMS micromirrors
Donnachie, Mark, Uttamchandani, Deepak, Bauer, RalfYear:
2019
Language:
english
DOI:
10.1109/OMN.2019.8925050
File:
PDF, 7.90 MB
english, 2019