[IEEE 2019 IEEE SENSORS - Montreal, QC, Canada (2019.10.27-2019.10.30)] 2019 IEEE SENSORS - Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability
Nitta, Kyotaro, Sone, Masato, Tang, Haochun, Chen, Chun-Yi, Chang, Tso-Fu Mark, Yamane, Daisuke, Iida, Shinichi, Machida, Katsuyuki, Ito, Hiroyuki, Masu, KazuyaYear:
2019
Language:
english
DOI:
10.1109/SENSORS43011.2019.8956496
File:
PDF, 1.03 MB
english, 2019