Particle-in-cell simulations and passive bulk model of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 03 Vol. 38; Iss. 2

Particle-in-cell simulations and passive bulk model of collisional capacitive discharge

Kawamura, Emi, Lieberman, Michael A., Lichtenberg, Allan J., Chabert, Pascal
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Volume:
38
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5135575
Date:
March, 2020
File:
PDF, 2.66 MB
english, 2020
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