![](/img/cover-not-exists.png)
Low-temperature Crystallization and Paraelectric-ferroelectric Phase Transformation in Nanoscale ZrO 2 Thin Films Induced by Atomic Layer Plasma Treatment
Yi, Sheng-Han, Huang, Kuei-Wen, Lin, Hsin-Chih, Chen, Miin-JangYear:
2020
Journal:
Journal of Materials Chemistry C
DOI:
10.1039/c9tc04801d
File:
PDF, 2.40 MB
2020