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Design and characterization of compact digital RF MEMS capacitors and phase shifters in CMOS 0.35µm technology
Abdel Aziz, Ahmed, Bakri-Kassem, Maher, Mansour, Raafat RJournal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab71e6
Date:
January, 2020
File:
PDF, 2.06 MB
2020