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[IEEE 2019 Compound Semiconductor Week (CSW) - Nara, Japan (2019.5.19-2019.5.23)] 2019 Compound Semiconductor Week (CSW) - Investigation of InP/Si bonding condition for optimizing Photoluminescence property by Surface Activated Bonding based on Fast Atom Beam
Wang, Yuning, Mitarai, Takuya, Amemiya, Tomohiro, Nishiyama, Nobuhiko, Arai, ShigehisaYear:
2019
Language:
english
DOI:
10.1109/iciprm.2019.8819256
File:
PDF, 4.39 MB
english, 2019