3D Microlithography Using an Integrated System of 5-mm...

3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder

Shiba,, Jeon,, Kim,, Kim,, Kim,
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Volume:
11
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi11020157
Date:
January, 2020
File:
PDF, 3.51 MB
english, 2020
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