Sputter deposition of NiW films from a rotatable target

Applied Surface Science 2020 / 05 Vol. 511

Sputter deposition of NiW films from a rotatable target

Rausch, Martin, Golizadeh, Mehran, Kreiml, Patrice, Cordill, Megan J., Winkler, Jörg, Mitterer, Christian
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Volume:
511
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2020.145616
Date:
May, 2020
File:
PDF, 3.09 MB
english, 2020
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