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Sensors and Actuators A: Physical 2020 / 2

19-picometer mechanical step displacement measurement using heterodyne interferometer with phase-locked loop and piezoelectric driving flexure-stage

Dong Nguyen, Thanh, Duong, Quang Anh, Higuchi, Masato, Tung Vu, Thanh, Wei, Dong, Aketagawa, Masato
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Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2020.111880
Date:
February, 2020
File:
PDF, 3.59 MB
2020
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