Micro-Nano Fabrication of Self-Aligned Silicon Electron...

Integrated Ferroelectrics 2020 / 01 Vol. 204; Iss. 1

Micro-Nano Fabrication of Self-Aligned Silicon Electron Field Emitter Arrays Using Pulsed KrF Laser Irradiation

Shamim, Mohammed Zubair Mohammed, Persheyev, Saydulla, Zaidi, Monji, Usman, Mohammed, Shiblee, Mohammad, Ali, Syed Jaffar, Rahman, Mohammad Rizwanur
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Volume:
204
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2019.1674988
Date:
January, 2020
File:
PDF, 2.38 MB
2020
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