[IEEE 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - Mexico City, Mexico (2019.9.11-2019.9.13)] 2019 16th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) - Composition of Metal Layers in CMOS-MEMS Micromachining Process
Granados-Rojas, Benito, Reyes-Barranca, Mario Alfredo, Flores-Nava, Luis Martin, Stephany Abarca-Jimenez, Griselda, Aleman-Arce, Miguel Angel, Gonzalez-Navarro, Yesenia EleonorYear:
2019
DOI:
10.1109/iceee.2019.8884506
File:
PDF, 5.82 MB
2019