Phenomenological and Elementary Reaction Analysis of Poly-crystalline Silicon CVD Process
Shimizu, Ryosuke, Januma, Tadashi, Ogino, Masaaki, Sugiyama, Masakazu, Koshi, Mitsuo, Shimogaki, YukihiroVolume:
716
Year:
2002
Journal:
MRS Proceedings
DOI:
10.1557/PROC-716-B11.9
File:
PDF, 210 KB
2002