Six Degrees-of-Freedom Direct-Driven Nanopositioning Stage...

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IEEE/ASME Transactions on Mechatronics 2020

Six Degrees-of-Freedom Direct-Driven Nanopositioning Stage using Crab-Leg Flexures

Kang, Sunghoon, Lee, Moon Gu, Choi, Young-Man
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Year:
2020
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/TMECH.2020.2972301
File:
PDF, 7.60 MB
2020
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