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[IEEE 2017 IEEE International Conference on Plasma Science (ICOPS) - Atlantic City, NJ (2017.5.21-2017.5.25)] 2017 IEEE International Conference on Plasma Science (ICOPS) - A Parallelization Method For Time Periodic Steady State In Simulation Of Radio Frequency Sheath Dynamics
Kwon, Deuk-Chul, Shin, Sung-Sik, Yu, Dong-HunYear:
2017
DOI:
10.1109/plasma.2017.8496054
File:
PDF, 1.20 MB
2017