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Subwavelength gratings fabricated on semiconductor substrates via E-beam lithography and lift-off method
Kien Wen Sun, Shih-Chieh Huang, Ara Kechiantz, Chien-Ping LeeVolume:
37
Language:
english
Pages:
8
DOI:
10.1007/s11082-005-2027-1
Date:
March, 2005
File:
PDF, 343 KB
english, 2005