On-Chip CMOS-MEMS-Based Electroosmotic Flow Micropump...

Journal of Microelectromechanical Systems 2020 / 2 Vol. 29; Iss. 1

On-Chip CMOS-MEMS-Based Electroosmotic Flow Micropump Integrated With High-Voltage Generator

Okamoto, Yuki, Ryoson, Hiroyuki, Fujimoto, Koji, Ohba, Takayuki, Mita, Yoshio
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Volume:
29
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2953290
Date:
February, 2020
File:
PDF, 16.58 MB
2020
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