On the mechanical behavior of a wide tunable capacitive...

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On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications

Ghasemi, Salar, Afrang, Saeid, Rezazadeh, Ghader, Darbasi, Sima, Sotoudeh, Behzad
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Journal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04779-9
Date:
February, 2020
File:
PDF, 1.14 MB
2020
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