Role of phase transformation in possible wear mechanisms in...

Materials Chemistry and Physics 2020 / 04 Vol. 245

Role of phase transformation in possible wear mechanisms in silicon microelectromechanical-system devices

Liu, Fan-Wei, Kung, Jennifer, Kuo, Jui-Chao, Liu, Bernard Haochih, Chueh, Yu-Lun
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Volume:
245
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2020.122765
Date:
April, 2020
File:
PDF, 2.10 MB
2020
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