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Molecular Beam Mass Spectrometry System for Characterization of Thermal Plasma Chemical Vapor Deposition
Soonam Park, Feng Liao, John M. Larson, Steven L. Girshick, Michael R. ZachariahVolume:
24
Pages:
20
DOI:
10.1007/s11090-004-2273-1
Date:
September, 2004
File:
PDF, 2.15 MB
2004