Effect of Ion Energy on Structure and Composition of...

Plasma Chemistry and Plasma Processing 2005 / 08 Vol. 25; Iss. 4

Effect of Ion Energy on Structure and Composition of Cathodic Arc Deposited Alumina Thin Films

Johanna Rosén, Stanislav Mráz, Ulrich Kreissig, Denis Music, Jochen M. Schneider
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Volume:
25
Language:
english
Pages:
15
DOI:
10.1007/s11090-004-3130-y
Date:
August, 2005
File:
PDF, 370 KB
english, 2005
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