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Nanoscale limits of angular optical scatterometry
Zhu, Ruichao, Faria-Briceno, Juan J., Brueck, S. R. J., Joseph, Praveen, Singhal, Shrawan, Sreenivasan, S. V.Volume:
10
Journal:
AIP Advances
DOI:
10.1063/1.5092802
Date:
January, 2020
File:
PDF, 4.49 MB
2020