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Numerical Modeling of an Ar–H2Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions
Rubin Ye, Anthony B. Murphy, Takamasa IshigakiVolume:
27
Language:
english
Pages:
16
DOI:
10.1007/s11090-007-9055-5
Date:
April, 2007
File:
PDF, 576 KB
english, 2007