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[IEEE 2019 Compound Semiconductor Week (CSW) - Nara, Japan (2019.5.19-2019.5.23)] 2019 Compound Semiconductor Week (CSW) - Growth of Single Crystalline c-In 2 O 3 (111) Layers on Off-Axis c-Plane Sapphire Substrates by Halide Vapor Phase Epitaxy
Saimoto, Yuya, Nagai, Kenta, Nakahata, Hidetoshi, Konishi, Keita, Kumagai, YoshinaoYear:
2019
DOI:
10.1109/ICIPRM.2019.8818999
File:
PDF, 1.47 MB
2019