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[IEEE 2019 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2019.12.7-2019.12.11)] 2019 IEEE International Electron Devices Meeting (IEDM) - Vertical Nanowire and Nanosheet FETs: Device Features, Novel Schemes for Improved Process Control and Enhanced Mobility, Potential for Faster & More Energy Efficient Circuits
Veloso, A., Hikavyy, A., Loo, R., Paraschiv, V., Chan, B. T., Radisic, D., Li, W., Versluijs, J. J., Teugels, L., Sebaai, F., Favia, P., Eneman, G., Bender, H., Vancoille, E., Scheerder, J. E., FleiscYear:
2019
DOI:
10.1109/IEDM19573.2019.8993602
File:
PDF, 2.56 MB
2019