[IEEE 2019 Compound Semiconductor Week (CSW) - Nara, Japan (2019.5.19-2019.5.23)] 2019 Compound Semiconductor Week (CSW) - Fabrication of c-AIN/a-Sapphire Templates by Sputtering and High-Temperature Annealing
Hayashi, Yusuke, Fujikawa, Kaito, Uesugi, Kenjiro, Shojiki, Kanako, Miyake, HidetoYear:
2019
DOI:
10.1109/iciprm.2019.8819350
File:
PDF, 2.67 MB
2019