Plasma Characteristics of Internal Inductively Coupled...

Plasma Chemistry and Plasma Processing 2011 / 06 Vol. 31; Iss. 3

Plasma Characteristics of Internal Inductively Coupled Plasma Source with Ferrite Module

Jong Hyeuk Lim, Kyong Nam Kim, Min Hwan Jeon, Jong Tae Lim, Geun Young Yeom
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Volume:
31
Language:
english
Pages:
9
DOI:
10.1007/s11090-011-9292-5
Date:
June, 2011
File:
PDF, 441 KB
english, 2011
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