Diagnosis of Active Species in Reactive Acetylene Plasma by...

Diagnosis of Active Species in Reactive Acetylene Plasma by Laser-Ionization Molecular-Beam Time-of-Flight Mass Spectrometry

Chunlei Feng, Liping Wang, Yan Wang, Liang Gao, Hongbin Ding
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Volume:
31
Language:
english
Pages:
11
DOI:
10.1007/s11090-011-9295-2
Date:
June, 2011
File:
PDF, 453 KB
english, 2011
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