Diagnosis of Active Species in Reactive Acetylene Plasma by Laser-Ionization Molecular-Beam Time-of-Flight Mass Spectrometry
Chunlei Feng, Liping Wang, Yan Wang, Liang Gao, Hongbin DingVolume:
31
Language:
english
Pages:
11
DOI:
10.1007/s11090-011-9295-2
Date:
June, 2011
File:
PDF, 453 KB
english, 2011