Measurements of Plasma Parameters in a Shielded Vacuum Arc...

IEEJ Transactions on Fundamentals and Materials 1999 Vol. 119; Iss. 12

Measurements of Plasma Parameters in a Shielded Vacuum Arc Deposition Apparatus for TiN Film Fabrication

Miyano, Ryuichi, Takikawa, Hirofumi, Shinsako, Koji, Sakakibara, Tateki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
119
Year:
1999
Journal:
IEEJ Transactions on Fundamentals and Materials
DOI:
10.1541/ieejfms1990.119.12_1397
File:
PDF, 1.34 MB
1999
Conversion to is in progress
Conversion to is failed