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Anisotropy of Fracture Strength and Fracture Toughness of Micro-Sized Single-Crystal Silicon
Ando, Taeko, Li, Xueping, Nakao, Shigeki, Kasai, Takashi, Shikida, Mitsuhiro, Sato, KazuoVolume:
125
Year:
2005
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.125.307
File:
PDF, 6.79 MB
2005