[IEEE 2019 IEEE International Integrated Reliability Workshop (IIRW) - South Lake Tahoe, CA, USA (2019.10.13-2019.10.17)] 2019 IEEE International Integrated Reliability Workshop (IIRW) - Spatially-Resolved Evaluation of Interface Defect Density on Macrostepped SiO 2 /SiC using Local Deep Level Transient Spectroscopy

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