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Mitigating the Impact of Channel Tapering in Vertical Channel 3-D NAND
Bhatt, Upendra Mohan, Manhas, Sanjeev Kumar, Kumar, Arvind, Pakala, Mahendra, Yieh, EllieYear:
2020
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2020.2967869
File:
PDF, 2.50 MB
2020