Electron and negative ions dynamics in a pulsed 100 MHz...

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Plasma Sources Science and Technology 2020 / 01

Electron and negative ions dynamics in a pulsed 100 MHz capacitive discharge produced in O2 and Ar/O2/C4F8 gas mixture

Sirse, Nishant, Tsutsumi, Takayoshi, Sekine, Makoto, Hori, Masaru, Ellingboe, Albert Rogers
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Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab7086
Date:
January, 2020
File:
PDF, 507 KB
english, 2020
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