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[IEEE 2019 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2019.12.7-2019.12.11)] 2019 IEEE International Electron Devices Meeting (IEDM) - Metal-Assisted Solid-Phase Crystallization Process for Vertical Monocrystalline Si Channel in 3D Flash Memory
Miyagawa, Hidenori, Fujiwara, Makoto, Mitani, Yuichiro, Obu, Tomoyuki, Aochi, Hideaki, Kusai, Haruka, Takaishi, Riichiro, Kawai, Tomoya, Kamimuta, Yuuichi, Murakami, Toshiya, Ariyoshi, Keiko, Asano, TYear:
2019
Language:
english
DOI:
10.1109/IEDM19573.2019.8993556
File:
PDF, 8.75 MB
english, 2019