[IEEE 2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Polyana, Ukraine (2019.5.22-2019.5.26)] 2019 IEEE XVth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Mathematical Model of Equivalent Stress Value Dependence from Displacement of RF MEMS Membrane
Bortnikova, Viktoriia, Yevsieiev, Vladyslav, Maksymova, Svitlana, Nevliudov, Igor, Chala, Olena, Kolesnyk, KostiantynYear:
2019
Language:
english
DOI:
10.1109/memstech.2019.8817394
File:
PDF, 8.00 MB
english, 2019