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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A Fully Differential Thin Film Piezo on Silicon Flexural Mode Ring Resonator with Exceptional Quality Factor
Pillai, Gayathri, Lai, Mei-Feng, Li, Sheng-ShianYear:
2019
Language:
english
DOI:
10.1109/transducers.2019.8808371
File:
PDF, 1.88 MB
english, 2019