Surface analysis and pumping speed measurements of...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2019 / 11 Vol. 37; Iss. 6

Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100–450 °C

Miyazawa, Tetsuya, Sugawara, Yuta, Yoshikawa, Ichiro, Sato, Yuta, Ohno, Shinya, Okada, Tomohiro, Matsumoto, Masuaki, Kikuchi, Takashi, Mase, Kazuhiko
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5111879
Date:
November, 2019
File:
PDF, 1.87 MB
english, 2019
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