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Effects of polishing parameters on surface quality in sapphire double-sided CMP
Li, Zhongyang, Deng, Zhaohui, Hu, YangxuanLanguage:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2020.02.116
Date:
February, 2020
File:
PDF, 3.47 MB
english, 2020